■ Equipment Specifications :

• Exposure light source, mask line width replication capability, I-line positive photoresist
  1um thickness, hard contact, 1um~2um,
  proximity 3um~5um.
   

■ Align the imaging system:

• Automatic alignment ability, the align key with clear geometric shape can be identified
  within 5um.

 

■ Productivity :

• For the alignment process, the exposure time is 3 seconds, and the mechanical capacity
  is 250 to 300 pieces per hour (without considering the material variability).

• No alignment, only exposure process, exposure time of 3 seconds, 280 to 360 pieces
  per hour mechanical capacity (without considering material variability and film withdrawal).
   

■ External Dimensions Weight:

• W: 1900 x D1600 x H2400mm

 

■ Weight :

• Weight about 1900kg