Fully automatic double-sided exposure machine
Auto Exposurer TT07
Semi-automatic single-sided exposure machine
Auto Exposurer
■ Equipment Specifications :
-
Exposure light source, mask line width replication capability, I-line positive photoresist
1um thickness, hard contact, 1um~2um,
proximity 3um~5um.
■ Align the imaging system:
-
Automatic alignment ability, the align key with clear geometric shape can be identified
within 5um.
■ Productivity :
-
For the alignment process, the exposure time is 3 seconds, and the mechanical capacity
is 250 to 300 pieces per hour (without considering the material variability). -
No alignment, only exposure process, exposure time of 3 seconds, 280 to 360 pieces
per hour mechanical capacity (without considering material variability and film withdrawal).
■ External Dimensions Weight:
-
W: 1900 x D1600 x H2400mm
■ Weight :
-
Weight about 1900kg



