Fully automatic double-sided exposure machine

Auto Exposurer TT07

Semi-automatic single-sided exposure machine

Auto Exposurer

■ Equipment Specifications :

  • Exposure light source, mask line width replication capability, I-line positive photoresist
    1um thickness, hard contact, 1um~2um,
    proximity 3um~5um.

     

■ Align the imaging system:

  • Automatic alignment ability, the align key with clear geometric shape can be identified
    within 5um.

 

■ Productivity :

  • For the alignment process, the exposure time is 3 seconds, and the mechanical capacity
    is 250 to 300 pieces per hour (without considering the material variability).

  • No alignment, only exposure process, exposure time of 3 seconds, 280 to 360 pieces
    per hour mechanical capacity (without considering material variability and film withdrawal).

     

■ External Dimensions Weight:

  • W: 1900 x D1600 x H2400mm

 

■ Weight :

  • Weight about 1900kg

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