Semi-automatic double exposure machine

Auto Exposurer TT08A

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Semi-automatic double-sided exposure machine

TT08A

■ Equipment Specifications :

  • Exposure lamp source, photomask line width replication capability, I-line positive
    photoresist 1um thickness, hard contact 1um~2um, proximity.

     

■ Alignment Imaging System :

  • Automatic alignment capability, recognizes geometrically clear align key within
    5um

 

■ Productivity :

  • Alignment process, exposure time 3 seconds, 250~300 pieces per hour mechanical
    capacity (without considering material variability rejection).

  • No alignment only exposure process, exposure time 3 seconds, 280~360 pieces per
    hour mechanical capacity (without considering material variability rejection).

     

■ External dimensions:

  • Width : 1900 x depth 1600 x height 2400mm

 

■ Weight :

  • Weight about 1700kg

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