■ Equipment Specifications:

• Exposure light source, mask line width replication capability, I-line positive photoresist 1um thickness, hard contact 1um~2um,
  proximity.
   

■ Align the imaging system:

• Automatic alignment ability, the align key with clear geometric shape can be identified within 5um

■ production   can:

• For the alignment process, the exposure time is 3 seconds, and the mechanical capacity is 250 to 300 pieces per hour (without considering the material variability).

• No alignment, only exposure process, exposure time of 3 seconds, mechanical capacity of 280~360 pieces per hour (without considering material variability and unloading).

■ External Dimensions Weight:

• W: 1900 x D1600 x H2400mm

■ heavy   quantity:

• Weight about 1700kg

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