■ Exposure of light sources :

• The I-line output intensity is about 30~40mW/cm2, and the
  uniformity is within plus or minus 5%. The parallel half angle of
  the light source is about 1.5~3 degrees depending on the
  diameter of the light outlet. 

■ Alignment Imaging System :

• Industrial microscope 30/10x two magnification switchable zoom

 

■ Productivity :

• Alignment process, (according to the operator's proficiency), familiar
  with the operation of the operator, about 200 pieces per hour
  (according to the operator's proficiency)
   

■ External dimensions :

• W: 1600  x L. 900 x H. 1250 mm

 

■ Weight :

• 重約140kg

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